Gas field ion microscopes having multiple operation modes
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US Patent 8455840B2
Gas field ion microscopes having multiple operation modes
Lawrence Scipioni Co-Inventor
Details of Patent
This patent is for method of operating a gas field ion microscope system comprising a gas field ion source, the gas field ion source comprising a tip including a plurality of atoms, the method comprising:
  • operating the gas field ion microscope system in a first mode including interacting a first ion beam with a sample, at least about 80% of the ions in the first ion beam being generated by a first number of atoms of the plurality of atoms of the tip; and
  • operating the gas field ion microscope system in a second mode including interacting a second ion beam with the sample, at least about 80% of the ions in the second ion beam being generated by a second number of atoms of the plurality of atoms of the tip
Wherein:
  • the first mode is different from the second mode, and the first number of atoms is different from the second number of atoms, and
  • ​ the sample is not removed from the gas field ion microscope system between the first and second modes of operation.
​
 This method has a wide range of functions in semiconductor fabrication.